JAN EVANGELISTA PURKYNĚ UNIVERSITY IN ÚSTÍ NAD LABEM
Study programmes & Course catalogue
for academic year 2024/2025
JAN EVANGELISTA PURKYNĚ UNIVERSITY IN ÚSTÍ NAD LABEM
Česky
Search

Course: Plasma technologies for the preparation of nanolayers

» List of faculties » PRF » KFY
Course title Plasma technologies for the preparation of nanolayers
Course code KFY/PD54
Organizational form of instruction Lecture
Level of course Doctoral
Year of study not specified
Semester Winter and summer
Number of ECTS credits 0
Language of instruction Czech
Status of course Compulsory-optional
Form of instruction Face-to-face
Work placements This is not an internship
Recommended optional programme components None
Lecturer(s)
  • Kormunda Martin, doc. Ing. Ph.D.
  • Matoušek Jindřich, Mgr. Ph.D.
Course content
unspecified

Learning activities and teaching methods
unspecified
Learning outcomes
Prerequisites
unspecified

Assessment methods and criteria
unspecified
Recommended literature
  • Behrisch R., Eckstein W. ed.. Sputtering by Particle Bombardment, Springer, 2007.
  • D. M. Hoffman, B. Singh, J. H. Thomas. Handbook of Vacuum Science and Technology, Academic Press, 1998.
  • Lieberman M., Lichtenberg A.. Principles of Plasma Discharges and Material Processing, Wiley, 2005.
  • Milton Ohring. Materials Science of Thin Films, Academic Press, 2002.
  • Rabalais J. W. ed. Low energy ion-surface interaction, Wiley, 1994.
  • Ricard A. Reactive Plasmas, Vide science, technigue et applications, Volume 52, No. 280, 1996.
  • Umrath W. ed. Fundamentals of Vacuum Technology, Leybold Vacuum,.


Study plans that include the course
Faculty Study plan (Version) Category of Branch/Specialization Recommended year of study Recommended semester
JAN EVANGELISTA PURKYNĚ UNIVERSITY IN ÚSTÍ NAD LABEM, date of update: 01.09.2024 23:51. Data created for academic year 2024/2025