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Lecturer(s)
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Novák Stanislav, prof. RNDr. CSc.
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Course content
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1. Methods of thin film deposition 2. Steps of thin film growth 3. Theories of nucleation and thin film growth 4. Computer simulations of thin film growth 5. Parameter influence on thin film structure 6. Film thickness and deposition rate measurements 7. Thin film morphology and structure control methods 8. Mechanical properties of thin films 9. Electrical properties of thin films 10. Magnetic and optical properties of thin films 11. Thin film use 12. Computer simulations of thin film morphology 13. Computer simulations of electrical properties of thin films
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Learning activities and teaching methods
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unspecified
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Learning outcomes
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The course aims to provide students an overview in the field of thin films and their properties and to understand the influence of very small thicknesses on the material properties.
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Prerequisites
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unspecified
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Assessment methods and criteria
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unspecified
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Recommended literature
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Eckertová L. Fyzika tenkých vrstev. New York - Praha, 1973.
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Eckertová L. Physics of Thin Films. New York - Praha, 1986.
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